Anti-sticking behavior of DLC-coated silicon micro-molds

Pure carbon(C), nitrogen(N) and titanium(Ti) doped diamond-like carbon (DLC) coatings were deposited on silicon (Si) micro-molds by dc magnetron sputtering deposition to improve the tribological performance of the micro-molds. The coated and uncoated Si molds were used in injection molding for the fabrication of secondary metal-molds, which were used for the replication of micro-fluidic devices. The bonding structure, surface roughness, surface energy, critical load and friction coefficient of the DLC coatings were characterized with micro-Raman spectroscopy, atomic force microscopy (AFM), contact angle, microscratch and ball-on-disc sliding wear tests, respectively. It was observed that the doping conditions had significant effects on Raman peak positions, mechanical and tribological properties of the coatings. The G peak shifted toward a lower position with N and Ti doping. The DLC coating deposited with 1 sccm N2 flow rate showed the lowest G peak position and the smoothest surface. The surface energies of the pure carbon and Ti-doped DLC coatings were lower than that of the N-doped DLC, which was more significant at a higher N2 flow rate. In terms of adhesion and friction coefficient, it was observed that the Ti-doped DLC coating had the best performance. Ti incorporated in the DLC coating decreased the residual stress of the coating, which improved the adhesive strength of the coating with the Si substrate.